E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports StdTpc-Silicon on Insulator 1-0312 (technical revision)

1-0312 (technical revision)

This Test Method is applicable to categories of wafers specified in SEMI M1 used in advanced IC manufacturing

89 mm wall (1/4 in

SEMI MF28-0317E (editorial revision)

such as cell controllers or recipe servers

E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports StdTpc-Silicon on Insulator 1-0312 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This guideline defines the zones and volumes in which load port status indicators and load port operation switches should be placed. The purpose of this guideline is to give a similarity in the placement of them on a 300 mm