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11-1106 (Reapproved 1211)
SEMI D29-1101 (Reapproved 1113)
1 This version of the Specification applies to the substrate types: wafers
1 The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements
SEMI E16-90 (Reapproved 1104)
E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Revision:SEMI E30.5-0302 (Reapproved 0217) - Superseded 11-1106 (Reapproved 1211)This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications
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US$ 397.80
US$ 290.75