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SEMI MF674-92 (Reapproved 1999) (first SEMI publication)
SEMI E87-1017 (designation update)
This Specification covers the substrate requirements for monocrystalline high-purity indium phosphide wafers used in semiconductor and electronic device manufacturing
This Guide applies to characterization of consumption
この文書は，装置製造業者が装置の設計および試験を行う際に使用される。記載された試験方法は，装置の動作確認と装置の購入仕様で両立性を確認するために装置製造業者によって使用される。
S00700 - SEMI S7 - Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications StdTpc-Jig ID SEMI MF674-92 (Reapproved 1999) (firstThis Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5, 2015. Available at www. semiviews. org and www. semi. org in May 2015; originally published in 1994; previously published March 2010. This Document is intended to enable report users to determine the qualifications of the evaluating company
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