G08200 - SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process StdPbc-1015 This method is to be

This method is to be used with ANSI/ISAS75

geometry and surface deviations

SEMI E35-95 (first published)

8 for further information

• SOI wafers (refer to SEMI M41

G08200 - SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process StdPbc-1015 This method is to beThis Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated frame cassette transport systems, and or to meet ergonomic requirements for manually loaded equipment. This is a Standard covering equipment for 300 mm frame cassette only. Referenced SEMI