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Current edition approved by the North American Regional Standards Committee on July 11
wafers with deposited spheres of any material in this Practice serve as ‘light scattering intensity reference wafers’ rather than ‘size standards
ポイント･トゥ･ポイントのメッセージ通信の要求／応答の構造
製品，またはレチクル
SEMI MF672 — Test Method for Measuring Resistivity Profile Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe
C00340 - SEMI C3.40 - 四フッ化炭素（CF4），99.997%品質の仕様 StdPbc-0612 Current edition approved by theglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org200010 (CF4) Referenced SEMI Standards None.
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