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parallel interface for carrier transfer (SEMI E84)
このガイドは，半導体製造設備から放出される可能性のあるガス状及び粒子状汚染物質双方に対する削減方法の選択を行う際に使用されることを意図している。
本基準亦提供半導體設備的能源、電力與原料的使用率及耗量降低情形通報之方法。
SEMI E133-1014 (technical revision)
SEMI MF978-1106 (technical revision)
F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures StdPbc-0812 parallel interface for carrier transferThis standard was technically reapproved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available on www. semi. org February 1999; to be published June 1999. Originally published in 1993. Editorial changes were made to 3. 1. 1, 6. 2. 1, and 6. 2. 2. This document summarizes gas
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