E18100 - SEMI E181 - Specification for Panel FOUP for Panel Level Packaging StdPbc-0116 静電気放電（ESD： electrostatic discharge）は製品とレチクルに損傷を与える｡また，ESDイベントは電磁妨害（EMI： electromagnetic interference）を引き起こし，その結果，設備故障が発生する｡

静電気放電（ESD： electrostatic discharge）は製品とレチクルに損傷を与える｡また，ESDイベントは電磁妨害（EMI： electromagnetic interference）を引き起こし，その結果，設備故障が発生する｡

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E18100 - SEMI E181 - Specification for Panel FOUP for Panel Level Packaging StdPbc-0116 静電気放電（ESD： electrostatic discharge）は製品とレチクルに損傷を与える｡また，ESDイベントは電磁妨害（EMI： electromagnetic interference）を引き起こし，その結果，設備故障が発生する｡1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the Panel FOUP intended to be used to transport and store panels, as specified by SEMI 3D20 for 510 mm 515 mm panel size and 600 mm 600 mm panel size. 1. 2 This Specification is intended to define the reference planes for the dimensions of the Panel FOUP and the panel load port. 1. 3 This Specification is intended to define a set of requirements to ensure