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12-86 (technical revision)
The scope of this Document is a grade of xylene used in the semiconductor industry
notably for trace impurities
a mixed sample is used for analysis
total thickness variation (TTV)
C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality StdTpc-FPD Substrates 12-86 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in March 2003; originally published in 1994. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earths atmosphere; colorless liquid. Noncombustible; a cryogenic gas derived from liquid air by fractional
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