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SEMI C93-0217 (preliminary status removed)
The following two test methods are described:
1-0698 (Reapproved 0615)
This Specification defines a common set of feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays
3 This Specification provides the essential dimensional and certain other common characteristics of silicon wafers
HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes Revision:SEMI HB7-0615 - Current SEMI C93-0217 (preliminary status removed)This Standard was technically approved by the HB LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in June 2015. Crystalline sapphire wafers (CSW) are used as substrates for manufacturing compound semiconductor devices, in particular high brightness light emitting diodes (HB LED). In SEMI HB1 a multitude of