F08100 - SEMI F81 - Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications StdPbc-0721 This Document also provides guidelines

This Document also provides guidelines for grades of methyl ethyl ketone for which a need has been identified

reference datum

for a 300 mm wafer

1-0921E (technical revision)

This Guide applies to chemical blending equipment used within a semiconductor manufacturing facility for the purposes of producing chemicals used for wafer processing

F08100 - SEMI F81 - Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications StdPbc-0721 This Document also provides guidelines1 Purpose 1. 1 The purpose of this Specification is to provide visual inspection and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. These criteria are meant to ensure that welds are of sufficient quality to provide the required system purity, weld integrity, and weld strength for use