P03600 - SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) StdVol-Process Chemicals The purpose of this guideline

The purpose of this guideline is to establish standard nomenclature for photomask defect classifications

SEMI E122-0703 (technical revision)

This Standard describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero

本仕様はフラットパネルディスプレイ用ガラス基板の供給者および，あるいは購入者により利用され，使用されるすべてのガラス基板に有効である。

its use for materials acceptance is not recommended unless the parties involved establish the degree of correlation which can be expected

P03600 - SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) StdVol-Process Chemicals The purpose of this guidelineThe purpose of this Guide is (1) to define common and important specifications of magnification references which are used for calibrating magnifications of critical dimension measurement scanning electron microscopes (CD SEMs), and as the result (2) to provide magnification references which are easy for anyone to use. It is preferable that design, manufacture and purchase specifications for CD SEM magnification references conform to this Guide.