M03500 - SEMI M35 - Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection Revision:SEMI M35-1105 - Superseded SEMI M83-1112 (first published)

SEMI M83-1112 (first  published)

This Test Method provides for determining the effective area of the mercury probe contact using polished bulk reference wafers that have been measured for resistivity at 23°C in accordance with SEMI MF84 (refer to Note 1)

Related Information 3 gives a suggested reporting format that is adaptable to varying any of the sample or system parameters

SEMI M41 — Specification of Silicon-on-Insulator (SOI) for Power Device/ICs

moisture ingress from non-sealed edge)

M03500 - SEMI M35 - Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection Revision:SEMI M35-1105 - Superseded SEMI M83-1112 (first published)* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1