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E19400 - SEMI E194 - Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons StdTpc-Equipment Communications and AI together

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Description

and AI together

本書は,ポリマーペレットの表面積を測定するための試験方法を規定する。

SEMI E63-0699 (technical revision)

org in June 2013

本テスト方法を使用して,ユーザは,UHPガス分配システム内への大気の漏洩源を特定してトラブルシューティングを行うための,十分な情報を得ることができる。

E19400 - SEMI E194 - Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons StdTpc-Equipment Communications and AI together1 Purpose 1. 1 This Guide describes analytical methods for determining the extractable surface particles from a critical chamber component (CCC) or a coupon by using ultrasonic aided, deionized water (DIW) extraction followed by using a liquid particle counter (LPC). 1. 2 This Guide is intended to promote communication among the relevant parties (e. g., processing equipment users, processing equipment manufacturers, CCC manufacturers, cleaning service

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