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M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Lang-English The purpose of this Document

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Description

The purpose of this Document is to provide a test method for determination of total normality for alkaline developer solutions

there is a broader range of opportunities available in new facilities that incorporate water saving applications in the basis of design

本文書は,液体のケミカル原料,溶液,溶剤を保持する金属製(例えばステンレス鋼)キャニスターに使用される継手のタイプ,寸法,間隔を規定するものである。

orgで入手可能となる。初版は1978年発行。前版は2005年11月発行。

This Guide is based on experimental data on 300-mm diameter silicon wafer pairs

M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Lang-English The purpose of this DocumentThe purpose of this document is to present a process for ion implantation, activation, and measurement of the resulting layers so that meaningful comparisons can be made between various lots of semi insulating GaAs. This test will be performed by the supplier so that product may be represented in a standard way. Referenced SEMI Standards None.

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