E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0600 - Superseded A standardization of the communication

A standardization of the communication concept between FMCS and FPUs will support FPU manufacturers

The system concept involves mating a door on a cassette container to a door on an equipment canopy and transferring the cassette into

SEMI E1-78 (first published)

SEMI E69-0298 (Reapproved 0309)

D32で規定されたベア・ガラスIDの位置の規定は一箇所であり，大型化に伴い運用効率上複数の基板IDが必要である。そのため，D32を基本として効率的な運用を行える基板ID位置を規定するものである。

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0600 - Superseded A standardization of the communication1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of