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functionality and interfaces for facility monitoring and control systems (FMCS) and the various facility package units (FPU) to enable a standardized and integrated communication between them
SEMI E143-0306 (first published)
semiconductor fabrication and flat panel display) factory
This standard was technically approved by the global Flat Panel Display Committee
SEMI F93 — Specification for Dimension of One Port Components for 1
E14700 - SEMI E147 - Guide for Equipment Data Acquisition (EDA) StdPbc-0526 functionality and interfaces for facilityThis standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. E This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to 6. This guide document provides additional information about the Equipment Data Acquisition (EDA)
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