F08300 - SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F83-0312 - Superseded but rather

but rather

3  The following groups of utilities are covered in this Guide

• Exhaust and other process effluents

SEMI F63-0521 (technical revision)

Coefficient of thermal expansion and glass transition temperature (see SEMI G75

F08300 - SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F83-0312 - Superseded but ratherThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas