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1 This Guide is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure processed wafers to be used in a 3DS-IC process
is well known to be essential to many
SEMI C90-00-0725 (complete rewrite)
Given that moisture generation is subject to many pitfalls
The need for ppb moisture standards is addressed by specifying procedures for reducing the output of ppm moisture standards to the ppb range
C05100 - SEMI C51 - Specification for Xylenes Revision:SEMI C51-0699 - Superseded 1 This Guide is intendedThe purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard. Test methods have been shown to give statistically valid results. The scope of this Document is a grade of xylene used in the semiconductor industry. This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o , m , and p isomers) 99. 0% min and Ethyl benzene
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