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the integrity of these parts is very important for the performance of EFFU
SEMI E4-0699 (Reapproved 0307)
SEMI E18-1017 (technical revision)
SEMI E5-0708 (technical revision)
irritating and corrosive gas with a sharp
F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters Revision:SEMI F38-0699 - Superseded the integrity of these partsNOTICE: This Document was completely rewritten in 2019. The purpose of this Document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using point of use (POU) gas filters. This Test Method defines an evaluation method for POU filters of various media (e. g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. POU filters are