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or formation technique
SEMI E35-0299 (technical revision)
SEMI E30-0200A (technical revision)
Standardized specifications for Si feedstock materials are expected to reduce these interface problems and to enable a common understanding of material properties and terms
This Standard expands the SEMI E30 requirements and capabilities in the areas of the processing state model
F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems Revision:SEMI F46-0999 - Inactive or formation techniqueThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been